| Receiving |
Lot number assigned. Material counted and entered into Lot database |
| Incoming |
Thick, Flats, Films, Broken, Chips, Sort. |
| Strip |
Wet Chemistry Tailored to Film Type –
Oxide, SiN, Poly, Al, TiN, Photo resist, etc.
|
| Pre Polish Gauge |
Measure For Thick, Flatness, Resistivity, Type
|
| Stock Polish |
Controlled Silicon Removal Rates
|
| Final Polish |
High Purity Final Polish Slurry
|
| Pre Clean |
Sequential SC1/SC2 Megasonic Cleaning |
| Dry |
Yield Up 2000, Steag IPA, or APET dryer |
| Visual |
100% visual inspection for scratches, haze, chips, etc. |
| Final Gauge |
Measure 100% for Thick, Type, Resistivity, Flatness
|
| Final Clean |
Sequenced MegaSonic w/ Dilute SC-1/SC-2/O3 |
| Laser Inspection |
100% laser inspection for LPDs. Data stored by Lot on server for C of A |
| Final QA |
Quality Dept. samples each lot prior to shipping
|
| Packaging |
Poly bag, desiccant, foil bag, labels and documents per customer requirement |
